Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO3/Si Microring Resonator
Open Access
- 23 December 2019
- Vol. 20 (1), 96
- https://doi.org/10.3390/s20010096
Abstract
Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO3) using a complementary metal-oxide-semiconductor (CMOS)-compatible process for the MRR and a sol-gel method for the WO3 layer and investigated its sensing characteristics at device temperatures of 5, 20, and 30 °C. At each temperature, a hydrogen concentration of as low as 0.1 vol% was successfully detected. The gas sensitivity increased with decreasing temperature. The dependence of the sensitivity on the device temperature can be attributed to the thickness of tungsten bronze (HxWO3) formed by WO3 during exposure to hydrogen gas. In addition, a hydrogen gas sensor based on a silicon-MRR-enhanced Mach–Zehnder interferometer (MRR-MZI) is proposed and its significantly high sensing ability using improved changes in the transmittance of light is theoretically discussed.Keywords
This publication has 34 references indexed in Scilit:
- Hydrogen Gas Sensors Based on Semiconductor Oxide NanostructuresSensors, 2012
- Fast and highly-sensitive hydrogen sensing of Nb2O5 nanowires at room temperatureInternational Journal of Hydrogen Energy, 2012
- Hydrogen sensors – A reviewSensors and Actuators B: Chemical, 2011
- An overview of hydrogen safety sensors and requirementsInternational Journal of Hydrogen Energy, 2011
- A fiber-optic hydrogen gas sensor with low propagation lossSensors and Actuators B: Chemical, 2010
- The hazards and risks of hydrogenJournal of Loss Prevention in the Process Industries, 2007
- Room temperature hydrogen response kinetics of nano–micro-integrated doped tin oxide sensorSensors and Actuators B: Chemical, 2007
- Electrochemical hydrogen sensor for safety monitoringSolid State Ionics, 2004
- A room-temperature operated hydrogen leak sensorSensors and Actuators B: Chemical, 2003
- Improvement of humidity dependence in gas sensor based on SnO2Sensors and Actuators B: Chemical, 2000