A Low-Noise High-Order Mode-Localized MEMS Accelerometer
- 1 April 2021
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 30 (2), 178-180
- https://doi.org/10.1109/JMEMS.2021.3057260
Abstract
This paper reports a precision mode-localized accelerometer operating in a higher-order flexural mode. The accelerometer consists of two symmetric resonators coupled by a central rigid coupler to generate an ultra-weak coupling factor. A reduced noise floor is observed when the resonators operate in the higher-order flexural mode compared to the basic lower-order mode. The mode-localized accelerometer working in the fifth-order mode demonstrates an input-referred bias instability of 130 ng and noise floor of 85 ng/root Hz, which are the best results obtained for accelerometers employing the mode localization paradigm to date. These results indicate that the performance of the mode-localized sensors can be improved by operating at a higher working frequency if the coupling factor and quality factor do not drop significantly. [2020-0365]Keywords
Funding Information
- Innovate U.K.
- Silicon Microgravity
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