Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone
Open Access
- 7 December 2020
- conference paper
- conference paper
- Published by MDPI AG in Proceedings
- Vol. 56 (1), 3
- https://doi.org/10.3390/proceedings2020056003
Abstract
In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here, we demonstrate its application for CO2 gas detection.Keywords
This publication has 2 references indexed in Scilit:
- Review on the conversion of thermoacoustic power into electricityThe Journal of the Acoustical Society of America, 2018
- Tungsten-Based SOI Microhotplates for Smart Gas SensorsJournal of Microelectromechanical Systems, 2008