Intrasheath electron dynamics in low pressure capacitively coupled plasmas

Abstract

We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Complex features inside the sheaths are identified in several physical quantities, which are sculptured by the trajectories of the bouncing electrons under the influence of the spatio-temporally varying electric field. Based on a systematic parameter variation the generation of the various features as a function of surface processes is explained and the trajectories of electrons of different origin are identified.