Fabrication of thin, luminescent, single-crystal diamond membranes
- 22 August 2011
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 99 (8), 081913
- https://doi.org/10.1063/1.3628463
Abstract
The formation of single-crystaldiamond membranes is an important prerequisite for the fabrication of high-quality optical cavities in this material.Diamond membranes fabricated using lift-off processes involving the creation of a damaged layer through ion implantation often suffer from residual ion damage, which severely limits their usefulness for photonic structures. The current work demonstrates that strategic etch removal of the most highly defective material yields thin, single-crystaldiamond membranes with strong photoluminescence and a Raman signature approaching that of single-crystal bulk diamond. These optically active membranes can form the starting point for fabrication of high-quality optical resonators.This publication has 18 references indexed in Scilit:
- Diamond photonicsNature Photonics, 2011
- Improved diamond surfaces following lift-off and plasma treatments as observed by x-ray absorption spectroscopyApplied Physics Letters, 2011
- Low-temperature tapered-fiber probing of diamond nitrogen-vacancy ensembles coupled to GaP microcavitiesNew Journal of Physics, 2011
- Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavityNature Photonics, 2011
- A diamond nanowire single-photon sourceNature Nanotechnology, 2010
- Ultralong spin coherence time in isotopically engineered diamondNature Materials, 2009
- Fabrication of Ultrathin Single‐Crystal Diamond MembranesAdvanced Materials, 2008
- Cavity QED with Diamond Nanocrystals and Silica MicrospheresNano Letters, 2006
- Raman investigation of damage caused by deep ion implantation in diamondPhysical Review B, 2000
- Electrochemical Patterning of Amorphous Carbon on DiamondJournal of the Electrochemical Society, 1993