Preparation of silicon thin diapharagms free from micropyramids using anisotropic etching in KOH solutions.
- 1 January 1992
- journal article
- Published by Taylor & Francis Ltd in JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
- Vol. 25 (6), 735-740
- https://doi.org/10.1252/jcej.25.735
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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