Special issue on approach to the technological limits. 1. scale. Microfabrication technologies for VLSI.
Open Access
- 1 January 1985
- journal article
- Published by Japan Society for Precision Engineering in Journal of the Japan Society of Precision Engineering
- Vol. 51 (1), 19-22
- https://doi.org/10.2493/jjspe1933.51.19