Design and Performance Evaluation of Modular Compliant Mechanisms

Abstract

In this study, modular design for compliant stage using a parallelogram flexure module is proposed. The material of the proposed stages chosen is Aluminium alloy T6-6051 due to excellent phase stability, low internal stresses, low density etc. The stage is driven by a linear electromagnetic actuator i.e. voice coil actuator. The preliminary static structural analysis is used to determine the range of motion, stiffness by considering stress limitations. FEA results show a maximum range of motion up to 30mm without exceeding stress limit of 275 Mpa. The proposed mechanisms provide low stiffness in the degree of freedom directions and provide large stiffness in the degree of constraint direction.so it is adequately constrained. The stage provides high precision and repeatability with an increased range of motion, minimal parasitic motions (i.e.150 microns) and limited cross axes coupling.