Design and Optimization of Silicon Based Uniform Grating Coupler with 1.55 μm Wavelength
Journal of Sensor Technology and Application , Volume 10, pp 31-36; https://doi.org/10.12677/jsta.2022.101005
Abstract: In order to solve the problem of low coupling efficiency and difficult realization of optical waveguide devices, we carried out the research of integrated optical waveguide coupling technology in this paper, designed a uniform grating coupler, simulated and optimized the grating coupler using finite difference time domain method. Calculation result: when the coupling angle = 20˚, the etching width w = 300 nm, the etching depth e = 70 nm, and the period p = 660 nm, the coupling efficiency of the grating coupler reaches 57.2%. The work of this paper can provide reference for the design of grating coupler.
Keywords: optimized / grating coupler / optical waveguide / uniform grating / coupling efficiency / etching
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