A microfabricated fiber-integrated diamond magnetometer with ensemble nitrogen-vacancy centers
- 9 May 2022
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 120 (19)
- https://doi.org/10.1063/5.0089732
Abstract
Miniaturization is a trend of development toward practical applications for diamond nitrogen-vacancy centers-based sensors. We demonstrate a compact diamond magnetic field sensor device using a standard microfabrication process. A single-crystal-diamond plate is embedded in a cavity formed with stacking of three silicon chips. Thermal compression bonding is implemented at silicon-silicon and diamond-silicon interfaces ensuring mechanical robustness. The specific construction volume for the essential sensor component is about 10 x 10 x 1.5 mm(3). By integrating a gradient index lens pigtailed fiber to the sensor device, 532-nm laser light and emitted fluorescence share a common path for excitation and detection. An omega-shaped transmission line for applied microwave power is fabricated directly on the surface of diamond. The integrated sensor device exhibits an optimized sensitivity of 2.03 nT.Hz(-1/2) and over twofold enhancement of fluorescence collection efficiency compared to bare diamond. Such a sensor is utilized to measure a magnetic field change caused by switching a household electrical appliance.& nbsp;Published under an exclusive license by AIP Publishing.Funding Information
- CAS Strategic Pilot Project (XDC07030200)
- R&D Program of Scientific Instruments and Equipment, Chinese Academy of Sciences (YJKYYQ20190026)
- National Key R&D Program of China (2021YFB3202500)
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