Design and characterization of a thin linear ultrasonic motor for miniature focus systems
- 1 October 2021
- journal article
- research article
- Published by Elsevier BV in Sensors and Actuators A: Physical
Abstract
No abstract availableKeywords
Funding Information
- Japan Society for the Promotion of Science
This publication has 29 references indexed in Scilit:
- A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonicsAcoustical Science and Technology, 2010
- Piezoelectric ultrasonic micro/milli-scale actuatorsSensors and Actuators A: Physical, 2009
- A piezoelectric linear actuator formed from a multitude of bimorphsSensors and Actuators A: Physical, 2004
- Settling control and performance of a dual-actuator system for hard disk drivesIEEE/ASME Transactions on Mechatronics, 2003
- Characteristics of 10 mm Multilayer L1-F2Mode Vibrator and Application to a Linear MotorJapanese Journal of Applied Physics, 2003
- Miniature piezoelectric motorsSensors and Actuators A: Physical, 2003
- Modeling, design and testing of the electrostatic shuffle motorSensors and Actuators A: Physical, 1998
- Contact mechanics of piezoelectric ultrasonic motorsSmart Materials and Structures, 1998
- Micro mechatronics and micro actuatorsIEEE/ASME Transactions on Mechatronics, 1996
- Ultrasonic Linear Motor Using Multilayer Piezoelectric ActuatorsJapanese Journal of Applied Physics, 1995