Compact solid-state vertical-cavity-surface-emitting-laser beam scanning module with ultra-large field of view

Abstract

A solid-state beam scanner is key element for next-generation 3D sensing. To overcome problems of current solid-state beam scanners, such as limited resolutions and difficulties in manufacturing, we previously invented a vertical-cavity-surface-emitting-laser (VCSEL) beam scanner based on a VCSEL waveguide/amplifier. In this paper, we proposed and demonstrated an electrical beam scanning module by integrating a surface grating VCSEL to the VCSEL scanner and by assisting with diffractive optical element and prism mirror for ultra-large field of view. We realized continuous fan beam scanning with record field of view of >100° and resolution points number of 1400.