Analysis of Possibility of Growth of Several Epitaxial Layers Simultaneously in Gas Phases Framework One Technological Process. On Possibility to Change Properties of Epitaxial Layers
- 1 December 2016
- journal article
- Published by American Scientific Publishers in Journal of Nanoengineering and Nanomanufacturing
- Vol. 6 (4), 270-277
- https://doi.org/10.1166/jnan.2016.1288