Special issue on high accuracy optical and non-contact measuring techniques. Measurement of the ultra precision diamond-turned surfaces by laser scatterometer.
- 1 January 1985
- journal article
- Published by Japan Society for Precision Engineering in Journal of the Japan Society of Precision Engineering
- Vol. 51 (4), 668-673
- https://doi.org/10.2493/jjspe1933.51.668