Silicon acoustic lens for scanning acoustic microscope (SAM)
- 9 December 2002
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Chemical etching of silicon wafer.Journal of the Japan Society of Precision Engineering, 1985
- Acoustic microscopy with mechanical scanning—A reviewProceedings of the IEEE, 1979
- Chemical Etching of Silicon: IV . Etching TechnologyJournal of the Electrochemical Society, 1976
- Chemical Etching of SiliconJournal of the Electrochemical Society, 1961