Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks
- 1 November 2010
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in 2010 IEEE Sensors
- p. 2061-2064
- https://doi.org/10.1109/icsens.2010.5690306
Abstract
A MEMS (micro-electromechanical systems) reflection-type dualfunction-integrated optical device is proposed. The device employs the compound in-plane and out-of-plane motion of a dual-slope mirror, which is driven by electrostatic actuators, to operate as optical switch and variable optical attenuator, independently. The MEMS-based dualfunctional devices can minimize the overall system size and weight, reduce external interconnections between individual devices, while at the same time maximize system information capacity, optical throughput, flexibility and reliability. Measurements of the MEMS-based dualfunctional devices show that the switching time is less than 9 ms, the excess loss is less than 3 dB and the controllable attenuation range is up to 39 dB, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation range.Keywords
This publication has 11 references indexed in Scilit:
- A 1 × 2 optical fiber switch using a dual-thickness SOI processJournal of Micromechanics and Microengineering, 2007
- End-coupled optical waveguide MEMS devices in the indium phosphide material systemJournal of Micromechanics and Microengineering, 2006
- Design and use of compact lensed fibers for low cost packaging of optical MEMS componentsJournal of Micromechanics and Microengineering, 2004
- A 5-volt operated MEMS variable optical attenuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2004
- Design and fabrication of slant-counter electrodes for optical switchesMicrowave and Optical Technology Letters, 2004
- Advanced fiber optical switches using deep RIE (DRIE) fabricationSensors and Actuators A: Physical, 2003
- The effect of shutter thickness on opto‐mechanical variable optical attenuatorsMicrowave and Optical Technology Letters, 2002
- The future of MEMS in telecommunications networksJournal of Micromechanics and Microengineering, 2000
- Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applicationsJournal of Microelectromechanical Systems, 1997
- Ideal microlenses for laser to fiber couplingJournal of Lightwave Technology, 1993