Optical Fiber Interferometer Based on Inner Air-Cavity With an Open Channel for Gas Pressure Sensing
- 22 September 2021
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 33 (21), 1201-1204
- https://doi.org/10.1109/lpt.2021.3114336
Abstract
An optical fiber Mach-Zehnder interferometer based on an inner air-cavity with an open micro-channel structure is presented. The device is fabricated by using femtosecond laser to inscribe a cavity structure in the optical fiber core, followed by discharging the cavity area with a fusion splicer to form an inner air-cavity in the fiber core, and finally create an open micro-channel with the help of hydrofluoric acid corrosion. The fiber in-line interferometric device is miniature, robust, and stable in operation and exhibits a high pressure sensitivity of ~3351 pm/MPa, with an extremely low temperature cross-sensitivity of 2.58 kPa/°C.Keywords
Funding Information
- National Natural Science Foundation of China (61975192)
This publication has 16 references indexed in Scilit:
- Simultaneous Refractive Index and Temperature Sensing With Precise Sensing LocationIEEE Photonics Technology Letters, 2016
- Demodulation of diaphragm based acoustic sensor using Sagnac interferometer with stable phase biasOptics Express, 2015
- Miniature and robust optical fiber in-line Mach–Zehnder interferometer based on a hollow ellipsoidOptics Letters, 2015
- Fiber in-line Mach–Zehnder interferometer based on an inner air-cavity for high-pressure sensingOptics Letters, 2015
- Highly-sensitive gas pressure sensor using twin-core fiber based in-line Mach-Zehnder interferometerOptics Express, 2015
- Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragmOptics Letters, 2014
- Sub-micron silica diaphragm-based fiber-tip Fabry–Perot interferometer for pressure measurementOptics Letters, 2014
- Review of fiber-optic pressure sensors for biomedical and biomechanical applicationsJournal of Biomedical Optics, 2013
- Ultrashort-pulse laser calligraphyApplied Physics Letters, 2008
- Motion of bubble in solid by femtosecond laser pulsesOptics Express, 2002