A MEMS coupled resonator for frequency filtering in air
- 1 December 2018
- journal article
- research article
- Published by Elsevier BV in Mechatronics
- Vol. 56, 261-267
- https://doi.org/10.1016/j.mechatronics.2018.01.002
Abstract
No abstract availableKeywords
Funding Information
- King Abdullah University of Science and Technology
This publication has 36 references indexed in Scilit:
- Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonatorsApplied Physics Letters, 2013
- Parametric Amplification and Self-Oscillation in a Nanotube Mechanical ResonatorNano Letters, 2011
- Mass Sensing Based on Deterministic and Stochastic Responses of Elastically Coupled NanocantileversNano Letters, 2009
- Parametric Nanomechanical Amplification at Very High FrequencyNano Letters, 2009
- A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- $Q$ 22-MHz Polysilicon Clamped-Clamped Beam ResonatorsIEEE Electron Device Letters, 2009
- Wafer level packaging of MEMSJournal of Micromechanics and Microengineering, 2008
- Synchronized Oscillation in Coupled Nanomechanical OscillatorsScience, 2007
- High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in airJournal of Micromechanics and Microengineering, 2006
- Radio frequency identification (RFID)Computers & Security, 2006
- Mechanical domain coupled mode parametric resonance and amplification in a torsional mode micro electro mechanical oscillatorJournal of Micromechanics and Microengineering, 2003