Complex mathematical models of comb drive accelerometers
- 1 September 2007
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in 2007 International Aegean Conference on Electrical Machines and Power Electronics
Abstract
This paper deals with the numerical modelling of 3D structure of surface micromachined (MEMS) accelerometers. Keeping knowledge about predefined accelerometer structure we start computer simulation procedure leading to final structure design, then to be defined as a basic structure for object oriented models.Keywords
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