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Recent Advances in the Study of Electrochemical Micromachining

M. Datta, R. V. Shenoy, L. T. Romankiw
Published: 1 February 1996

Abstract: The present paper reviews some fundamental aspects related to the understanding of the high rate anodic dissolution processes and their influence on thin film patterning by electrochemical micromachining. The role of convective mass transport and current distribution on the surface finish and shape evolution is discussed. Several examples of the applications of maskless and through-mask electrochemical micromachining are presented.
Keywords: Micromachining / Shapes / Thin films / Finishes / Masks

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