The MEMS-Based Electrochemical Seismic Sensor With Integrated Sensitive Electrodes by Adopting Anodic Bonding Technology
- 12 July 2021
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Sensors Journal
- Vol. 21 (18), 19833-19839
- https://doi.org/10.1109/jsen.2021.3096496
Abstract
Seismic sensors are the key sensitive components in geophysical exploration, and the new-type electrochemical seismic sensors have gradually aroused researchers’ interest for their superior performance in low-frequency domain and large working inclination. In this paper, a method was developed to fabricate the MEMS (micro-electro-mechanical systems) based integrated electrodes for the electrochemical seismic sensors. The proposed integrated electrodes which employed three-layer anodic bonding structure of silicon-glass-silicon served as the substitutes for multilayer manual assembly structures. Compared to previous counterparts, this integrated structure has the advantages of simplified assembly processes of sensitive unit and high consistency as the no requirement of manual alignment. The results shown that the cross-correlation coefficient between two proposed devices was quantified as 0.998 with the sensitivity of 5956 V/(m/s) @1Hz. This electrode is so far the sensitive structure which realize both high sensitivity and high integration in the electrochemical seismic sensors.Funding Information
- National Science Fund for Distinguished Young Scholars (61825107)
- Strategic Priority Research Program (A) of the Chinese Academy of Sciences (XDA22020302)
- national natural foundation of China (U1930206, 62071454, 62061136012)
This publication has 23 references indexed in Scilit:
- Design and Self-Noise of MET Closed-Loop Seismic AccelerometersIEEE Sensors Journal, 2017
- Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chipJournal of Micromechanics and Microengineering, 2016
- Molecular electronic transducer based planetary seismometer with new fabrication processPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2016
- A MEMS based electrochemical seismometer with a novel integrated sensing unitPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2016
- Microelectromechanical Systems-Based Electrochemical Seismic Sensors With Insulating Spacers Integrated Electrodes for Planetary ExplorationIEEE Sensors Journal, 2015
- A micro seismometer based on molecular electronic transducer technology for planetary explorationApplied Physics Letters, 2013
- Molecular Electric Transducers as Motion Sensors: A ReviewSensors, 2013
- Review: Inertial Sensors for Low-Frequency Seismic Vibration MeasurementBulletin of the Seismological Society of America, 2012
- Technological principles of motion parameter transducers based on mass and charge transport in electrochemical microsystemsRussian Journal of Electrochemistry, 2012
- Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMSKey Engineering Materials, 2012