Improved field-effect mobility in transfer-free graphene films synthesized via the metal agglomeration technique using high-crystallinity Ni catalyst films

Abstract

Transfer-free graphene synthesis was performed using the catalyst metal agglomeration technique. X-ray diffraction and electron backscattering diffraction measurements indicated that the quality of the Ni catalyst film was enhanced with the increase of the crystallite size of Ni (111) by heating treatments during and following Ni deposition. Moreover, Raman scattering measurements revealed that the graphene film synthesized using heating treatments for the Ni film had better structural qualities. We measured the maximum field-effect mobilities to be 1540 cm²/(V⸱s) for electrons and 1600 cm²/(V⸱s) for holes, which was approximately twice as large as those fabricated without the heating treatments.