Advanced fiber optical switches using deep RIE (DRIE) fabrication
- 1 January 2003
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 102 (3), 286-295
- https://doi.org/10.1016/s0924-4247(02)00401-6
Abstract
No abstract availableKeywords
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