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Advanced fiber optical switches using deep RIE (DRIE) fabrication

J. Li, Q.X. Zhang, A.Q. Liu
Published: 1 January 2003
Sensors and Actuators A: Physical , Volume 102, pp 286-295; doi:10.1016/s0924-4247(02)00401-6

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Keywords: surface roughness / drie / optical switch / fiber optic / optical communication system / mems / optical fibre / insertion loss

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