Constructing Silk Fibroin-Based Three-Dimensional Microfluidic Devices via a Tape Mask-Assisted Multiple-Step Etching Technique

Abstract

Regenerated silk fibroin (RSF) has been regarded as a very promising biomaterial for the preparation of microfluidic devices. However, the facile and low-cost fabrication of three-dimensional (3D) RSF microfluidic devices is still a great challenge. Herein, we developed a tape-mask-assisted multiple-step etching technique to fabricate 3D microfluidic devices based on water-annealed RSF films. Several rounds of tape adhesion– or peeling–etching cycles need to be conducted to produce 3D features on the RSF films with the LiBr aqueous solution as the etchant. The water-annealed RSF films could be effectively etched with 1.0 g·mL^–1 LiBr solution at 60 °C. The shape, width, and height of the 3D structures could be precisely tailored by controlling the mask pattern, etching conditions, and the number of etchings. Using the tape adhesion- and peeling-assisted multiple-etching techniques, the convex-pyramid-shaped and the concave-step-shaped structures could be successfully prepared on the RSF films, respectively. The RSF-film-based 3D micromixers and microfluidic separator were also manufactured with the proposed approach, exhibiting excellent liquid mixing and size-dependent particle sorting capabilities, respectively. The enzymatic degradation of RSF-film-based devices was also investigated to show their environmental friendliness. This work may not only provide a facile and low-cost method for the fabrication of RSF-based 3D microfluidic devices but also extend the applications of RSF in the fields of biomedical and chemical analysis.