Single-crystal diamond microelectromechanical resonator integrated with a magneto-strictive galfenol film for magnetic sensing
- 20 June 2019
- journal article
- research article
- Published by Elsevier BV in Carbon
- Vol. 152, 788-795
- https://doi.org/10.1016/j.carbon.2019.06.072
Abstract
No abstract availableKeywords
Funding Information
- JSPS KAKENHI (15H03999, 15H03980)
- Tsukuba Global Innovation Promotion Agency, Science and Technology Commission of Shanghai (16010500500)
- Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan
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