ALD-passivated silicon nanowires for broadband absorption applications
Open Access
- 1 June 2021
- journal article
- research article
- Published by AIP Publishing in AIP Advances
- Vol. 11 (6), 065101
- https://doi.org/10.1063/5.0054104
Abstract
Silicon photonics enables the fabrication of optical devices with standard semiconductor processing technology. With high transparency and modal confinement, Si has matured into a well-established infrared optical material. Nanostructured silicon has been studied extensively due to its optical properties, especially silicon nanowires due to the myriad of available fabrication techniques, the broad range of physical dimensions, and the resulting optical characteristics. In this study, we fabricate silicon nanowires using a wet chemical process and modify their absorptive properties via atomic layer deposition passivation. The passivated nanowires absorb 95% of light from the visible to infrared, with a minimal angular dependence, making them excellent candidates for broadband absorber applications.Keywords
This publication has 30 references indexed in Scilit:
- Review of the Preparation and Structures of Si Nanowires, Ge Quantum Dots and Their CompositesNano, 2019
- Light-Assisted MACE Method for the Control of Silicon Nanowire MorphologyIOP Conference Series: Materials Science and Engineering, 2018
- Optical and Electrical Characteristics of Silicon Nanowires Prepared by Electroless EtchingNanoscale Research Letters, 2017
- Atomic Layer Deposition Alumina-Passivated Silicon Nanowires: Probing the Transition from Electrochemical Double-Layer Capacitor to Electrolytic CapacitorACS Applied Materials & Interfaces, 2017
- Morphology dependence of optical reflectance properties for a high-density array of silicon nanowiresJapanese Journal of Applied Physics, 2014
- A review on electronic and optical properties of silicon nanowire and its different growth techniquesSpringerPlus, 2013
- Optical Properties of Individual Silicon Nanowires for Photonic DevicesACS Nano, 2010
- Silicon Nanowires: A Review on Aspects of their Growth and their Electrical PropertiesAdvanced Materials, 2009
- Silicon nanowires as efficient thermoelectric materialsNature, 2008
- Effects of Silicon Nanowires on HepG2 Cell Adhesion and SpreadingChemBioChem, 2007