Integrated Electro-Optic Modulator in Z-Cut Lithium Niobate Thin Film With Vertical Structure
- 22 September 2021
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 33 (23), 1285-1288
- https://doi.org/10.1109/lpt.2021.3114993
Abstract
We propose and demonstrate a Mach-Zehnder modulator in Z-cut lithium niobate thin film (LNTF) with a vertical electric field structure. By placing the metal electrodes on top and bottom of the waveguide rather than the usual lateral configuration, the electric field is fully overlapping the optical field. Such a configuration reduces the critical requirement of electrode alignment as needed in X/Y-cut LN based devices. Both the simulation and process details to realize the proposed device are demonstrated. The measured static performance accords well with the simulations. Additionally, we developed a new method to accurately characterize the dynamic performance of the Z-cut LNTF modulator, and the measured tuning efficiency is around 8.84 pm/V. Our proposed device validates the feasibility of integrated Z-cut LNTF based modulators, and will likely extend the research area of integrated lithium niobate photonics.Keywords
Funding Information
- National Research Foundation’s Competitive Research Programme (NRF-CRP15-2015-01)
- Quantum Engineering Programme (QEP-P2)
This publication has 18 references indexed in Scilit:
- High-efficiency chirped grating couplers on lithium niobate on insulatorOptics Letters, 2020
- Compact Racetrack Resonator on LiNbO3Journal of Lightwave Technology, 2020
- Ultra-efficient and fully isotropic monolithic microring modulators in a thin-film lithium niobate photonics platformOptics Express, 2020
- High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbit s−1 and beyondNature Photonics, 2019
- High-extinction electro-optic modulation on lithium niobate thin filmOptics Letters, 2019
- Real-time electrical tuning of an optical spring on a monolithically integrated ultrahigh Q lithium nibote microresonatorOptics Letters, 2019
- Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltagesNature, 2018
- Lithium Niobate Electro-Optic Racetrack Modulator Etched in Y-Cut LNOI PlatformIEEE Photonics Journal, 2018
- Silicon optical modulatorsNature Photonics, 2010
- A review of lithium niobate modulators for fiber-optic communications systemsIEEE Journal of Selected Topics in Quantum Electronics, 2000