Development of a Novel Dual-axis Large-displacement Microstage Using Lorentz Force Actuators and Curved-beam Springs
Open Access
- 1 January 2011
- journal article
- Published by Elsevier BV in Procedia Engineering
- Vol. 25, 689-692
- https://doi.org/10.1016/j.proeng.2011.12.170
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Microrelays With Bidirectional Electrothermal Electromagnetic Actuators and Liquid Metal Wetted ContactsJournal of Microelectromechanical Systems, 2007
- Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stagePublished by SPIE-Intl Soc Optical Eng ,2005
- Micro-machined XY stage for fiber optics module alignmentPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A two-dimensional self-aligning system driven by shape memory alloy actuatorsOptics & Laser Technology, 2004
- Advanced fiber optical switches using deep RIE (DRIE) fabricationSensors and Actuators A: Physical, 2003
- An electro-thermally driven microactuator with two dimensional motionMicrosystem Technologies, 2002
- Electromagnetic micro x-y stage with very thick Cu coil for probe-based mass data storage devicePublished by SPIE-Intl Soc Optical Eng ,2001
- Integration of a microlens on a micro XY-stageProceedings of SPIE, 1999
- AFM imaging with an xy-micropositioner with integrated tipSensors and Actuators A: Physical, 1995