Design and finite element modeling of a novel optical microsystems-based tactile sensor for minimal invasive robotic surgery

Abstract
Although recently Minimal Invasive Robotic Surgery (MIRS) has been more addressed because of its wide range of benefits, however there are still some limitations in this regard. In order to address the shortcomings of MIRS systems, various types of tactile sensors with different sensing principles have been presented in the last few years. In the present paper a MEMS-based optical sensor, which has been recently proposed by researchers, is investigated using numerical simulation. By this type of sensors real time quantification of both dynamic and statics contact forces between the tissue and surgical instrument would be possible. The presented sensor has one moving part and works based on the intensity modulation principle of optical fibers. It is electrically-passive, MRI-compatible and it is possible to be fabricated using available standard micro fabrication techniques. The behavior of the sensor has been simulated using COMSOL MULTIPHYSICS 3.5 software. Stress analysis is conducted on the sensor to assess the deflection of the moving part of the sensor due to applied force. The optical simulation is then conducted to estimate the power loss due to the moving part deflection. Using FEM modeling, the relation between force and deflection is derived which is necessary for the calibration of the sensor.

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