Effects of deposition time and RF power on the film characteristics of magnetron sputtered silicon carbide thin films
- 1 January 2022
- journal article
- Published by Elsevier BV in Materials Today
- Vol. 52, 2432-2438
- https://doi.org/10.1016/j.matpr.2021.10.423
Abstract
No abstract availableFunding Information
- Botswana International University of Science and Technology
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