Abstract
In this current paper, oxygen content of a fine particle size SiC (H. C. Starck UF 25 Silicon Carbide) and coarser particle size SiC (Saint Gobain Silicon Carbide) were modified by using different concentrations of HF for etching. Fully dense silicon carbide ceramics (>99% th. density) were produced by the spark plasma sintering technique at 1950 °C under an applied pressure of 50 MPa for 5 min hold with boron carbide and carbon addition. Archimedes method, scanning electron microscopy, and the ultrasound analysis were used to examined density, microstructure, elastic (E), shear (G), and bulk (K) moduli of dense silicon carbide ceramics to investigate the effect of oxygen impurities on the densification and the properties of silicon carbide. The results showed that high oxygen content is detrimental to the final density of SPS silicon carbide. When the oxygen content increased from 0.60 to 5.92 wt.%, the relative density decreased from 99.99% to 96%. For both SiC powders, by increasing the etching time, the grain size of SiC decreased. It means that the high oxygen caused grain growth. Ultrasound analysis results showed that the high oxygen content affected the elastic properties. SiC samples with the high oxygen content had a lower elastic moduli, shear moduli and bulk moduli. It was clear that increasing the oxygen content decreased the elastic properties.